;---------------------------------------------------------------
s1f1_h S1F1 W
\
;---------------------------------------------------------------
s1f2_E S1F2 E
<L
<A[6] mdln="MDLNXX">
<A[6] softrev="SoftRV">
>
\
;---------------------------------------------------------------
s1f1_E S1F1 W E
\
;---------------------------------------------------------------
s1f2_H S1F2
<L
>
\
;---------------------------------------------------------------
s1f3_1sv S1F3 W
<L ; 1
<U4[4] svid1=100>
>
\
;---------------------------------------------------------------
s1f3_2sv S1F3 W
<L ; 2
<U4[4] svid1=100>
<U4[4] svid2=101>
>
\
;---------------------------------------------------------------
s1f3_3sv S1F3 W
<L ; 3
<U4[4] svid1=100>
<U4[4] svid2=101>
<U4[4] svid3=102>
>
\
;---------------------------------------------------------------
s1f3_4sv S1F3 W
<L ; 4
<U4[4] svid1=100>
<U4[4] svid2=101>
<U4[4] svid3=102>
<U4[4] svid4=103>
>
\
;---------------------------------------------------------------
s1f3_sv_all S1F3 W
<L ; 1
>
\
;---------------------------------------------------------------
s1f4_1_1 S1F4 E
<L ; 2
<A[0..32] carr_id1="C0111">
<A[0..32] stat1="ProcessWait">
>
\
;---------------------------------------------------------------
s1f11_svid_all s1F11 W
<L ; 0
>
\
;---------------------------------------------------------------
s1f11_2 S1F11 W
<L ; 2
<U4[4] svid1 = 102>
<U4[4] svid2 = 101>
>
\
;---------------------------------------------------------------
s1f12 S1F12 E
<L ; 2
<L ; 3
<U4[4] svid1 = 102>
<A[0..32] svname1 = "temp-left">
<A[0..32] svunit1 = "C degree">
>
<L ; 3
<U4[4] svid2 = 101>
<A[0..32] svname2 = "temp-right">
<A[0..32] svunit2 = "C degree">
>
>
\
;---------------------------------------------------------------
s1f13_H S1F13 W
<L ; 2
>
\
;---------------------------------------------------------------
s1f13_E S1F13 W E
<L ; 2
<A[6] mdln="AZP456">
<A[6] softrev="1.00">
>
\
;---------------------------------------------------------------
s1f14_H S1F14
<L ; 2
<B[1] commack=x00>
<L ;0
>
>
\
;---------------------------------------------------------------
s1f14_E S1F14 E
<L ; 2
<B[1] commack=x00>
<L ; 2
<A[6] mdln="AZP456">
<A[6] softrev="1.00">
>
>
\
;---------------------------------------------------------------
s1f15_offline S1F15 W
\
;---------------------------------------------------------------
s1f16 S1F16 E
<B[1] oflack=x00>
\
;---------------------------------------------------------------
s1f17_online S1F17 W
\
;---------------------------------------------------------------
s1f18 S1F18 E
<B[1] onlack=x00>
\
;---------------------------------------------------------------
s2f13_ec_all S2F13 W
<L ; 0
>
\
;---------------------------------------------------------------
s2f13_ec S2F13 W
<L ;
<U4[4] ecid1 = 2>
<U4[4] ecid2 = 4>
>
\
;---------------------------------------------------------------
s2f14_ec S2F14 E
<L ;
<U4[4] ecval1 = 123>
<A[5] ecval2 = "4.56">
>
\
;---------------------------------------------------------------
s2f15_chg_ec S2F15 W
<L ;
<L
<U4[4] ecid1= 1>
<A[6] ecval1="DSH222">
>
<L
<U4[4] ecid2= 4>
<U2[2] ecval2=4>
>
>
\
;---------------------------------------------------------------
s2f16 S2F16 E
<B[1] EAC=x00>
\
;---------------------------------------------------------------
S2F17_time S2F17 W E
\
;---------------------------------------------------------------
S2F18 S2F18
<A[12] @time="YYMMDDHHNNSS">
\
;---------------------------------------------------------------
s2f23_tr_cond S2F23 W
<L ;
<A[8] trid = "TRACE123">
<A[8] dsper = "00000100"> ; 1 sec
<A[2] totsmp = "09">
<A[2] repgsz = "03">
<L
<U4[4] svid1=0x10000>
<U4[4] svid2=0x10001>
<U4[4] svid3=0x10002>
>
>
\
s2f24 S2F24 E
<B[1] tiaack=0>
\
;---------------------------------------------------------------
s2f29_ecname S2F29 W
<L ;
<U4[4] ecid1 = 2>
<U4[4] ecid2 = 4>
>
\
;---------------------------------------------------------------
s2f29_ecname_all S2F29 W
<L ;
>
\
;---------------------------------------------------------------
s2f30_ecname S2F30 E
<L
<L ;
<U4[4] ecid_1 = 2>
<A[1..64] name_1 = "temp_1">
<U2[2] min_1 = 30>
<U2[2] max_1 = 60>
<U2[2] def_1 = 35>
<A[0..32] units_1 = "C-degree">
>
<L
<U4[4] ecid_2 = 4>
<A[1..64] name_2 = "temp_2">
<U2[2] min_2 = 30>
<U2[2] max_2 = 60>
<U2[2] def_2 = 35>
<A[0..32] units_2 = "C-degree">
>
>
\
;---------------------------------------------------------------
s2f31_time S2F31 W
<A[16] @time="YYYYMMDDHHNNSSCC">
\
;---------------------------------------------------------------
s2f32 S2F32 E
<B[1] tiack=x00>
\
;---------------------------------------------------------------
s2f33_rp_all S2F33 W
<L
<U4[4] dataid = 0 >
<L ; 0
>
>
\
;---------------------------------------------------------------
s2f33_rp1 S2F33 W
<L
<U4[4] dataid = 0 >
<L ; 0
<L
<U4[4] rpid1= 100>
<L
<U4[4] vid2=2>
>
>
>
>
\
;---------------------------------------------------------------
s2f33_rp2 S2F33 W
<L
<U4[4] dataid = 0 >
<L ; 0
<L
<U4[4] rpid1= 100>
<L
<U4[4] vid1=1 >
<U4[4] vid2=2>
>
>
>
>
\
;---------------------------------------------------------------
s2f34 S2F34 E
<B[1] drack=x00>
\
;---------------------------------------------------------------
s2f35_ce_all S2F35 W
<L
<U4[4] dataid = 0 >
<L ; 0
>
>
\
;---------------------------------------------------------------
s2f35_ce_1 S2F35 W
<L
<U4[4] dataid = 0 >
<L ; 0
<L
<U4[4] ceid1= 100>
<L
<U4[4] rpid1=100>
>
>
>
>
\
;---------------------------------------------------------------
s2f35_ce_2 S2F35 W
<L
<U4[4] dataid = 0 >
<L ; 0
<L
<U4[4] ceid1= 100>
<L
<U4[4] rpid1=1 >
<U4[4] rpd2=2>
>
>
>
>
\
;---------------------------------------------------------------
s2f36 S2F36 E
<B[1] lrack=x00>
\
;---------------------------------------------------------------
s2f37_ce_ena_all S2F37 W
<L ; 2
<T[1] ceed=F>
<L ; 0
>
>
\
s2f37_ce_ena_2 S2F37 W
<L ; 2
<T[1] ceed=F>
<L
<U4[4] ceid1 = 100>
<U4[4] ceid2 = 201>
>
>
\
;---------------------------------------------------------------
s2f38 S2F38 E
<B[1] erack=x00>
\
;---------------------------------------------------------------
s2f41_ctrl S2F41 W
<L ; 2
<A[0..32] rcmd="CTRL-change">
<L ; 1
<L ; 2
<A[0..32] cpname1="ControlMode">
<U1[1] ctrl_mode=0>
>
>
>
\
;---------------------------------------------------------------
s2f41_pp_select S2F41 W
<L ; 2
<A[0..32] rcmd="PP-select">
<L ; 2
<L ; 2
<A[0..32] cpname1="CarrierID">
<A[0..32] cpval1="C0111">
>
<L ; 2
<A[0..32] cpname2="RecipeID">
<U2[2] cpval2=1>
>
>
>
\
;---------------------------------------------------------------
s2f41_pp_start S2F41 W
<L ; 2
<A[0..32] rcmd="PP-start">
<L ; 0
>
>
\
;---------------------------------------------------------------
s2f42_pp_ng S2F42 E
<L ; 2
<B[1] hcack=x03>
<L ; 1
<L ; 2
<A[0..32] cpname1="CarrierID">
<B[1] cpack1=x01>
>
>
>
\
;---------------------------------------------------------------
s2f42_pp_ok S2F42 E
<L ; 2
<B[1] hcack=x00>
<L ; 0
>
>
\
;---------------------------------------------------------------
s2f42_st_ok S2F42 E
<L ; 2
<B[1] hcack=x00>
<L ; 0
>
>
\
;---------------------------------------------------------------
s2f43_sp_2 S2F43 W
<L ; 2
<L ; 2
<U1[1] = 2>
<L ; 2
<U1[1] =23>
<U1[1] =43>
>
>
<L ; 2
<U1[1] = 4>
<L ; 2
<U1[1] =41>
<U1[1] =5>
>
>
>
\
;---------------------------------------------------------------
s2f43_sp_all_f S2F43 W
<L ; 2
<L ; 2
<U1[1] = 2>
<L ; 2
>
>
<L ; 2
<U1[1] = 4>
<L ; 2
>
>
>
\
;---------------------------------------------------------------
s2f43_all_t S2F43 W
<L ; 2
>
\
;---------------------------------------------------------------
s2f44 S2F44 E
<L ; 2
<B[1] rscack=0>
<L ; 0
>
>
\
;---------------------------------------------------------------
s2f45_lmt_all_f S2F45 W
<L ; 2
<u4[4] dataid = 111>
<L ; Lm
<L ; L2
<U4[4] vid1=11>
<L ; Ln
<L ; L2
<B[1] limitid1a=10>
<L ; Lp
<U2[2] upperdb1a=57>
<u2[2] lowerdb1a=32>
>
>
<L ; L2
<B[1] limitid1b=11>
<L ; Lp
<U2[2] upperdb1b=68>
<u2[2] lowerdb1b=28>
>
>
>
>
<L ; L2
<U4[4] vid2=13>
<L ; Ln
<L ; L2
<B[1] limitid2a=12>
<L ; Lp
<U4[4] upperdb2a=157>
<u4[4] lowerdb2a=132>
>
>
<L ; L2
<B[1] limitid2b=13>
<L ; Lp
<U4[4] upperdb2b=168>
<u4[4] lowerdb2b=128>
>
>
>
>
>
>
\
;---------------------------------------------------------------
s2f45_lmt_all_t S2F45 W
<L ; 2
<u4[4] dataid = 111>
<L
>
>
\
;---------------------------------------------------------------
s2f46 S2F46 E
<L ; 2
<B[1] vlaack=0>
<L ; 0
>
>
\
;---------------------------------------------------------------
s2f47_lmt_attr S2F47 W
<L ; lm
<u4[4] vid1a = 10>
<u4[4] vid1b = 11>
<u4[4] vid2a = 12>
<u4[4] vid2b = 13>
>
\
;---------------------------------------------------------------
s2f47_lmt_attr_all S2F47 W
<L ; 0
>
\
;---------------------------------------------------------------
s2f48 S2F48 E
<L ; 0
>
\
;---------------------------------------------------------------
s2f49_rc_typical S2F49 W
<L
<U4[4] dataid = 112>
<A[0..32] objspec="PP-OBJECT"> ; 2
<A[0..32] rcmd="PP-select">
<L ; 2
<L ; 2
<A[0..32] cpname1="CarrierID">
<A[0..32] cpval1="C0111">
>
<L ; 2
<A[0..32] cpname2="RecipeID">
<U2[2] cpval2=1>
>
>
>
\
;---------------------------------------------------------------
s2f49_rc_mult_val S2F49 W
<L
<U4[4] dataid = 112>
<A[0..32] objspec="PP-OBJECT"> ; 2
<A[0..32] rcmd="PP-select">
<L ; 2
<L ; 2
<A[0..32] cpname1="CarrierID">
<L
<A[0..32] cpval11="C0111">
<A[0..32] cpval12="RCP111">
>
>
<L ; 2
<A[0..32] cpname2="RecipeID">
<U2[2] cpval2=1>
>
>
>
\
;---------------------------------------------------------------
s2f49_rc_mult_list S2F49 W
<L
<U4[4] dataid = 112>
<A[0..32] objspec="PP-OBJECT"> ; 2
<A[0..32] rcmd="PP-select">
<L ; 2
<L ; 2
<A[0..32] cpname1="CarrierID">
<L
<L
<A[0..32] cpnamex1="PP-CO111">
<A[0..32] cpvalx1="RCP111">
>
<L
<A[0..32] cpnamex2="PP-C0222">
<A[0..32] cpvalx2="RCP222">
>
>
>
<L ; 2
<A[0..32] cpname2="RecipeID">
<U2[2] cpval2=1>
>
>
>
\
;---------------------------------------------------------------
s3f17_Proceed S3F17 W
<L ; 5
<U4[4] dataid=0>
<A[1..32] carrieraction="ProceedWithCarrier">
<A[0..32] carr_id="CARID_01">
<U1[1] portid=1>
<L ; 0
>
>
\
S3F17_Pod S3F17 W
<L // 5
<U4[4]=0>
<A[14]="ProceedWithPod">
<A[6]="POD002">
<U1[1]=105>
<L // 2
<L // 2
<A[8]="Capacity">
<U1[1]=1>
>
<L // 2
<A[7]="SlotMap">
<L // 1
<U1[1]=2>
>
>
>
>
\
;---------------------------------------------------------------
s3f17_ContentMap S3F17 W
<L
<U4[4] dataid = 432>
<A[1..32] carrieraction = "ProceedWithCarrier">
<A[1..32] carrierspec = "CARID_01">
<U1[1] ptn = 1>
<L
<L
<A[1..32] cattrid1 = "ContentMap">
<L 25
<L 2
<A[10]="LOT1234-01">
<A[10]="LOT1234-01S">
>
<L 2
<A[0]="">
<A[0]="">
>
<L 2
<A[0]="">
<A[0]="">
>
<L 2
<A[0]="">
<A[0]="">
>
<L 2
<A[0]="">
<A[0]="">
>
<L 2
<A[0]="">
<A[0]="">
>
<L 2
<A[0]="">
<A[0]="">
>
<L 2
<A[0]="">
<A[0]="">
>
<L 2
<A[0]="">
<A[0]="">
>
<L 2
<A[0]="">
<A[0]="">
>
<L 2
<A[0]="">
<A[0]="">
>
<L 2
<A[0]="">
<A[0]="">
>
<L 2
<A[0]="">
<A[0]="">
>
<L 2
<A[10]="LOT1234-14">
<A[10]="LOT1234-14">
>
<L 2
<A[10]="LOT1234-14">
<A[10]="LOT1234-15">
>
<L 2
<A[10]="LOT1234-14">
<A[10]="LOT1234-16">
>
<L 2
<A[10]="LOT1234-14">
<A[10]="LOT1234-17">
>
<L 2
<A[10]="LOT1234-14">
<A[10]="LOT1234-18">
>
<L 2
<A[10]="LOT1234-14">
<A[10]="LOT1234-19">
>
<L 2
<A[10]="LOT1234-14">
<A[10]="LOT1234-20">
>
<L 2
<A[10]="LOT1234-14">
<A[10]="LOT1234-21">
>
<L 2
<A[10]="LOT1234-14">
<A[10]="LOT1234-22">
>
<L 2
<A[10]="LOT1234-14">
<A[10]="LOT1234-23">
>
<L 2
<A[10]="LOT1234-14">
<A[10]="LOT1234-24">
>
<L 2
<A[10]="LOT1234-14">
<A[10]="LOT1234-25">
>
>
>
<L
<A[1..32] cattrid2 = "Usage">
<A[0..32] usage = "PRODUCT">
>
<L
<A[1..32] cattrid3 = "LocationID">
<A[0..32] location = "LOC-123T">
>
>
>
\
;---------------------------------------------------------------
s3f18 S3F18 E
<L ; 2
<U1[1] caack=0>
<L ; 0
>
>
\
;---------------------------------------------------------------
s3f18_1 S3F18 E
<L ; 2
<U1[1] caack=1>
<L ; 1
<L ; 2
<S1[1] errcode=1>
<A[1..80] errtext="ｵﾌﾞｼﾞｪｸﾄ不明">
>
>
>
\
;---------------------------------------------------------------
s3f23_gaction S3F23 W
<L ; 3
<A[0..32] PTAction="CHANGEACCESS">
<A[1] PTGroup="1">
<L
<L ; 2
<A[0..32] ParaName="AccessMode">
<U1[1] ParaVal=0>
>
>
>
\
;---------------------------------------------------------------
s3f24 S3F24 E
<L
<B[1] CAACK=x00>
<L
<L
<U1[1] = 0 >
<A[0..32] ="OK">
>
>
>
\
;---------------------------------------------------------------
s3f25_ptaction S3F25 W
<L ; 3
<A[0..32] PTAction="CHANGEACCESS">
<U1[1] PTN=1>
<L
<L ; 2
<A[0..32] ParaName="AccessMode">
<U1[1] ParaVal=0>
>
>
>
\
;---------------------------------------------------------------
s3f26 S3F26 E
<L
<B[1] CAACK=x00>
<L
<L
<U1[1] = 0 >
<A[0..32] ="OK">
>
>
>
\
;---------------------------------------------------------------
s3f27_chg_access S3F27 W
<L ; 2
<U1[1] access_mode=0>
<L ; 3
<U1[2] portid1=1>
<U1[2] portid2=2>
<U1[2] portid3=54>
>
>
\
;---------------------------------------------------------------
s3f28 S3F28 E
<L
<S1[1] caack=0>
<L ; 0
>
>
\
;---------------------------------------------------------------
s3f28_1 S3F28 E
<L
<S1[1] caack=1>
<L ; 1
<L ; 1
<L ; 3
<U1[2] portid1=1>
<U1[1] errcode=1>
<A[1..80] errtext="ｵﾌﾞｼﾞｪｸﾄ不明">
>
>
>
>
\
;---------------------------------------------------------------
s3f35_ret_job S3F35 W
<L ; 7
<A[0..80] action = "ReticleTransferJob" >
<A[0..80] podid = "POD-001">
<U1[1] inptn = 101 >
<U1[1] outptn = 102>
<L ; attr
<L
<A[0..80] attrid_1 = "Capacity">
<U1[1] attrdata_1 = 1>
>
<L
<A[0..80] attrid_2 = "ContentMap">
<L
<A[0..80] attrdata_2 = "RETID01">
>
>
<L
<A[0..80] attrid_3 = "Slotmap">
<L
<U1[1] attrdata_3 = 2>
>
>
>
<L ; remove inst
<L ; 3
<A[0..80] ret_id1 = "RETID01">
<A[0..80] inst_1 = "Remove">
<L
<L
<A[0..80] attrid_r1 = "Capacity">
<U1[1] attrdata_r1 = 1>
>
<L
<A[0..80] attrid_r2 = "ContentMap">
<L
<A[0..80] attrdata_r2 = "RETID01">
>
>
>
>
>
<L ; place inst
<L ; 2
<A[0..80] ret_id3 = "RETID02">
<A[0..80] inst_3 = "PLACE">
>
>
>
\
;---------------------------------------------------------------
s3f36_1 S3F36 E
<L
<U1[1] rpmack=1>
<L ; 1
<L ; 2
<U1[1] err_code1 = 1>
<A[0..80] err_txt1 = "error_1">
>
<L ; 2
<U1[1] err_code2 = 3>
<A[0..80] err_txt21 = "error_3">
>
>
>
\
;---------------------------------------------------------------
s5f1_alarm S5F1 W E
<L ; 3
<B[1] alcd=x12>
<U4[4] alid=1>
<A[40] altx="Communication Establish Error">
>
\
;---------------------------------------------------------------
s5f2 S5F2
<B[1] ackc5=x00>
\
;---------------------------------------------------------------
s5f3_al_ena S5F3 W
<L ; 2
<T[1] aled=T>
<U4[4] alid=1 >
>
\
;---------------------------------------------------------------
s5f3_al_all S5F3 W
<L ; 2
<T[1] aled=T>
<U4[0] >
>
\
;---------------------------------------------------------------
s5f4 S5F4 E
<B[1] ackc5=x00>
\
;---------------------------------------------------------------
s5f5_list_all S5F5 W
<U4[0] >
\
;---------------------------------------------------------------
s5f5_list_1 S5F5 W
<U4[8] = 1,5 >
\
;---------------------------------------------------------------
s5f6 S5F6 E
<L
>
\
;---------------------------------------------------------------
s5f7_list_ena_all S5F7 W
\
;---------------------------------------------------------------
s5f8 S5F8 E
<L
>
\
;---------------------------------------------------------------
S6F1_tr_send S6F1 W E
<L
<A[6]="TRACE1">
<U2[2]=2>
<A[16]="2005061515033816">
<L 6
<U2[2]=1>
<A[16]=" ">
<U2[2]=1>
<A[16]=" ">
<U2[2]=1>
<A[16]=" ">
>
>
\
;---------------------------------------------------------------
s6f2 S6F2
<B[1] ackc6=0 >
\
;---------------------------------------------------------------
s6f5_mblk S6F5 W E
<L
<U4[4] dataid = 111>
<U4[4] datalength = 258>
>
\
;---------------------------------------------------------------
s6f6 S6F6
<B[1] grant6=0>
\
;---------------------------------------------------------------
s6f11_comm_state S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=100>
<L ; 1
<L ; 2
<U4[4] rptid=10>
<L ; 2
<A[16] @time="YYYYMMDDHHNNSSCC">
<U1[1] comm_state=0>
>
>
>
>
\
;---------------------------------------------------------------
s6f11_100_off S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=100>
<L ; 1
<L ; 2
<U4[4] rptid=100>
<L ; 2
<A[16] @time="YYYYMMDDHHNNSSCC">
<U2[2] ctrl_mode=0>
>
>
>
>
\
;---------------------------------------------------------------
s6f11_100_on S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=100>
<L ; 1
<L ; 2
<U4[4] rptid=100>
<L ; 2
<A[16] @time="YYYYMMDDHHNNSSCC">
<U2[2] ctrl_mode=2>
>
>
>
>
\
;---------------------------------------------------------------
s6f11_201 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=201>
<L ; 1
<L ; 2
<U4[4] rptid=500>
<L ; 8
<A[16] @time="YYYYMMDDHHNNSSCC">
<U1[1] port_transfer_state=1>
<U1[1] portID=1>
<A[0] carrier_id>
<U1[0] IDAttribute>
<U1[0] SlotAttribute>
<U1[1] PortAssociate=1>
<U1[0] AccessStatus>
>
>
>
>
\
;---------------------------------------------------------------
s6f11_205 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=205>
<L ; 1
<L ; 2
<U4[4] rptid=500>
<L ; 8
<A[16] @time="YYYYMMDDHHNNSSCC">
<U1[1] port_transfer_state=1>
<U1[1] portID=1>
<A[0..32] carrier_id="C0001">
<U1[0] IDAttribute>
<U1[0] SlotAttribute>
<U1[0] PortAssociate>
<U1[0] AccessStatus>
>
>
>
>
\
;---------------------------------------------------------------
s6f11_206 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=206>
<L ; 1
<L ; 2
<U4[4] rptid=500>
<L ; 8
<A[16] @time="YYYYMMDDHHNNSSCC">
<U1[1] port_transfer_state=1>
<U1[1] portID=1>
<A[0..32] carrier_id="C0001">
<U1[1] IDAttribute=3>
<U1[1] SlotAttribute=3>
<U1[1] PortAssociate=0>
<U1[1] AccessStatus=3>
>
>
>
>
\
;---------------------------------------------------------------
s6f11_207 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=207>
<L ; 1
<L ; 2
<U4[4] rptid=500>
<L ; 8
<A[16] @time="YYYYMMDDHHNNSSCC">
<U1[1] port_transfer_state=1>
<U1[1] portID=1>
<A[0..32] carrier_id="C0001">
<U1[1] IDAttribute=3>
<U1[1] SlotAttribute=3>
<U1[1] PortAssociate=0>
<U1[1] AccessStatus=3>
>
>
>
>
\
;---------------------------------------------------------------
s6f11_208 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=208>
<L ; 1
<L ; 2
<U4[4] rptid=500>
<L ; 8
<A[16] @time="YYYYMMDDHHNNSSCC">
<U1[1] port_transfer_state=1>
<U1[1] portID=1>
<A[0..32] carrier_id="C0001">
<U1[1] IDAttribute=3>
<U1[1] SlotAttribute=3>
<U1[1] PortAssociate=0>
<U1[1] AccessStatus=2>
>
>
>
>
\
;---------------------------------------------------------------
s6f11_209 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=209>
<L ; 1
<L ; 2
<U4[4] rptid=500>
<L ; 8
<A[16] @time="YYYYMMDDHHNNSSCC">
<U1[1] port_transfer_state=1>
<U1[1] portID=1>
<A[0..32] carrier_id="C0001">
<U1[1] IDAttribute=3>
<U1[1] SlotAttribute=3>
<U1[1] PortAssociate=0>
<U1[1] AccessStatus=3>
>
>
>
>
\
;---------------------------------------------------------------
s6f11_214 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=214>
<L ; 1
<L ; 2
<U4[4] rptid=500>
<L ; 8
<A[16] @time="YYYYMMDDHHNNSSCC">
<U1[1] port_transfer_state=1>
<U1[1] portID=1>
<A[0..32] carrier_id="C0001">
<U1[1] IDAttribute=2>
<U1[1] SlotAttribute=1>
<U1[1] PortAssociate=1>
<U1[1] AccessStatus=1>
>
>
>
>
\
;---------------------------------------------------------------
s6f11_215 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=215>
<L ; 1
<L ; 2
<U4[4] rptid=500>
<L ; 8
<A[16] @time="YYYYMMDDHHNNSSCC">
<U1[1] port_transfer_state=1>
<U1[1] portID=1>
<A[0..32] carrier_id="C0001">
<U1[1] IDAttribute=3>
<U1[1] SlotAttribute=1>
<U1[1] PortAssociate=0>
<U1[1] AccessStatus=1>
>
>
>
>
\
;---------------------------------------------------------------
s6f11_220 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=220>
<L ; 1
<L ; 2
<U4[4] rptid=500>
<L ; 8
<A[16] @time="YYYYMMDDHHNNSSCC">
<U1[1] port_transfer_state=1>
<U1[1] portID=1>
<A[0..32] carrier_id="C0001">
<U1[1] IDAttribute=3>
<U1[1] SlotAttribute=1>
<U1[1] PortAssociate=0>
<U1[1] AccessStatus=1>
>
>
>
>
\
;---------------------------------------------------------------
s6f11_221 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=221>
<L ; 1
<L ; 2
<U4[4] rptid=500>
<L ; 8
<A[16] @time="YYYYMMDDHHNNSSCC">
<U1[1] port_transfer_state=1>
<U1[1] portID=1>
<A[0..32] carrier_id="C0001">
<U1[1] IDAttribute=3>
<U1[1] SlotAttribute=3>
<U1[1] PortAssociate=0>
<U1[1] AccessStatus=2>
>
>
>
>
\
;---------------------------------------------------------------
s6f11_222 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=222>
<L ; 1
<L ; 2
<U4[4] rptid=500>
<L ; 10
<A[16] @time="YYYYMMDDHHNNSSCC">
<U1[1] port_transfer_state=1>
<U1[1] portID=1>
<A[0..32] carrier_id="C0001">
<U1[1] IDAttribute=3>
<U1[1] SlotAttribute=2>
<U1[1] PortAssociate=0>
<U1[1] AccessStatus=1>
<A[19] reason="VERIFICATION NEEDED">
<L ; 25
<U1[1] slotmap01=1>
<U1[1] slotmap02=1>
<U1[1] slotmap03=1>
<U1[1] slotmap04=1>
<U1[1] slotmap05=1>
<U1[1] slotmap06=1>
<U1[1] slotmap07=1>
<U1[1] slotmap08=1>
<U1[1] slotmap09=1>
<U1[1] slotmap10=1>
<U1[1] slotmap11=1>
<U1[1] slotmap12=1>
<U1[1] slotmap13=1>
<U1[1] slotmap14=1>
<U1[1] slotmap15=1>
<U1[1] slotmap16=1>
<U1[1] slotmap17=1>
<U1[1] slotmap18=1>
<U1[1] slotmap19=1>
<U1[1] slotmap20=1>
<U1[1] slotmap21=1>
<U1[1] slotmap22=1>
<U1[1] slotmap23=1>
<U1[1] slotmap24=1>
<U1[1] slotmap25=1>
>
>
>
>
>
\
;---------------------------------------------------------------
s6f11_223 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=223>
<L ; 1
<L ; 2
<U4[4] rptid=500>
<L ; 8
<A[16] @time="YYYYMMDDHHNNSSCC">
<U1[1] port_transfer_state=1>
<U1[1] portID=1>
<A[0..32] carrier_id="C0001">
<U1[1] IDAttribute=3>
<U1[1] SlotAttribute=1>
<U1[1] PortAssociate=0>
<U1[1] AccessStatus=1>
>
>
>
>
\
;---------------------------------------------------------------
s6f11_227 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=227>
<L ; 1
<L ; 2
<U4[4] rptid=500>
<L ; 8
<A[16] @time="YYYYMMDDHHNNSSCC">
<U1[1] port_transfer_state=1>
<U1[1] portID=1>
<A[0..32] carrier_id="C0001">
<U1[1] IDAttribute=2>
<U1[1] SlotAttribute=1>
<U1[1] PortAssociate=0>
<U1[1] AccessStatus=1>
>
>
>
>
\
;---------------------------------------------------------------
s6f11_228 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=228>
<L ; 1
<L ; 2
<U4[4] rptid=500>
<L ; 8
<A[16] @time="YYYYMMDDHHNNSSCC">
<U1[1] port_transfer_state=1>
<U1[1] portID=1>
<A[0] carrier_id>
<U1[0] IDAttribute>
<U1[0] SlotAttribute>
<U1[1] PortAssociate=1>
<U1[0] AccessStatus>
>
>
>
>
\
;---------------------------------------------------------------
s6f11_250 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=250>
<L ; 1
<L ; 2
<U4[4] rptid=501>
<L ; 4
<A[16] @time="YYYYMMDDHHNNSSCC">
<A[0..32] carrier_id="C0001">
<U1[1] AccessStatus=2>
<U1[1] remain_time=5>
>
>
>
>
\
;---------------------------------------------------------------
s6f11_260 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=260>
<L ; 1
<L ; 2
<U4[4] rptid=503>
<L ; 2
<U1[1] PortID=1>
<U1[1] access_mode=1>
>
>
>
>
\
;---------------------------------------------------------------
s6f11_261_auto S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=261>
<L ; 1
<L ; 2
<U4[4] rptid=503>
<L ; 2
<U1[1] PortID=1>
<U1[1] access_mode=1>
>
>
>
>
\
;---------------------------------------------------------------
s6f11_261_man S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=261>
<L ; 1
<L ; 2
<U4[4] rptid=503>
<L ; 2
<U1[1] PortID=1>
<U1[1] access_mode=2>
>
>
>
>
\
;---------------------------------------------------------------
s6f11_290 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=290>
<L ; 1
<L ; 2
<U4[4] rptid=500>
<L ; 8
<A[16] @time="YYYYMMDDHHNNSSCC">
<U1[1] port_transfer_state=1>
<U1[1] portID=1>
<A[0..32] carrier_id="C0001">
<U1[0] >
<U1[0] >
<U1[1] PortAssociate=1>
<U1[0] >
>
>
>
>
\
;---------------------------------------------------------------
s6f11_300 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=300>
<L ; 1
<L ; 2
<U4[4] rptid=500>
<L ; 8
<A[16] @time="YYYYMMDDHHNNSSCC">
<U1[1] port_transfer_state=1>
<U1[1] portID=1>
<A[0..32] carrier_id="C0001">
<U1[0] IDAttribute>
<U1[0] SlotAttribute>
<U1[0] PortAssociate>
<U1[0] AccessStatus>
>
>
>
>
\
;---------------------------------------------------------------
s6f11_402 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=402>
<L ; 1
<L ; 2
<U4[4] rptid=531>
<L ; 7
<A[16] @time="YYYYMMDDHHNNSSCC">
<A[0..32] locid="SOURCE">
<L ; 1
<A[0..32] WafAttr="LOTID,C0001">
>
<A[0..32] LOTID="LOTID">
<U1[1] SubstProc=0>
<U1[1] SubstState=0>
<A[0..32] SubstUsage="PRODUCT">
>
>
>
>
\
;---------------------------------------------------------------
s6f11_403 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=403>
<L ; 1
<L ; 2
<U4[4] rptid=530>
<L ; 3
<A[16] @time="YYYYMMDDHHNNSSCC">
<A[0..32] locid="WORK">
<L ; 1
<A[0..32] WafAttr="LOTID,C0001">
>
>
>
>
>
\
;---------------------------------------------------------------
s6f11_404 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=404>
<L ; 1
<L ; 2
<U4[4] rptid=530>
<L ; 3
<A[16] @time="YYYYMMDDHHNNSSCC">
<A[0..32] locid="WORK">
<L ; 1
<A[0..32] WafAttr="LOTID,C0001 ">
>
>
>
>
>
\
;---------------------------------------------------------------
s6f11_405 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=405>
<L ; 1
<L ; 2
<U4[4] rptid=530>
<L ; 3
<A[16] @time="YYYYMMDDHHNNSSCC">
<A[0..32] locid="WORK">
<L ; 1
<A[0..32] WafAttr="LOTID,C0001 ">
>
>
>
>
>
\
;---------------------------------------------------------------
s6f11_406 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=406>
<L ; 1
<L ; 2
<U4[4] rptid=530>
<L ; 3
<A[16] @time="YYYYMMDDHHNNSSCC">
<A[0..32] locid="DESTINAMTION">
<L ; 1
<A[0..32] WafAttr="LOTID,C0001 ">
>
>
>
>
>
\
;---------------------------------------------------------------
s6f11_407 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=407>
<L ; 1
<L ; 2
<U4[4] rptid=530>
<L ; 3
<A[16] @time="YYYYMMDDHHNNSSCC">
<A[0..32] locid=" ">
<L ; 1
<A[0..32] WafAttr="LOTID,C0001 ">
>
>
>
>
>
\
;---------------------------------------------------------------
s6f11_410 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=410>
<L ; 1
<L ; 2
<U4[4] rptid=530>
<L ; 3
<A[16] @time="YYYYMMDDHHNNSSCC">
<A[0..32] locid="WORK">
<L ; 1
<A[0..32] WafAttr="LOTID,C0001">
>
>
>
>
>
\
;---------------------------------------------------------------
s6f11_411 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=411>
<L ; 1
<L ; 2
<U4[4] rptid=530>
<L ; 3
<A[16] @time="YYYYMMDDHHNNSSCC">
<A[0..32] locid="DESTINATION">
<L ; 1
<A[0..32] WafAttr="LOTID,C0001,WFIDALL">
>
>
>
>
>
\
;---------------------------------------------------------------
s6f11_500 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=500>
<L ; 1
<L ; 2
<U4[4] rptid=600>
<L ; 3
<A[16] @time="YYYYMMDDHHNNSSCC">
<A[0..32] jobid="ControlJob001">
<U1[1] cjstate=1>
>
>
>
>
\
;---------------------------------------------------------------
s6f11_501 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=501>
<L ; 1
<L ; 2
<U4[4] rptid=600>
<L ; 3
<A[16] @time="YYYYMMDDHHNNSSCC">
<A[0..32] jobid="ControlJob001">
<U1[1] cjstate=2>
>
>
>
>
\
;---------------------------------------------------------------
s6f11_502 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=502>
<L ; 1
<L ; 2
<U4[4] rptid=600>
<L ; 3
<A[16] @time="YYYYMMDDHHNNSSCC">
<A[0..32] jobid="ControlJob001">
<U1[1] cjstate=4>
>
>
>
>
\
;---------------------------------------------------------------
s6f11_503 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=503>
<L ; 1
<L ; 2
<U4[4] rptid=600>
<L ; 3
<A[16] @time="YYYYMMDDHHNNSSCC">
<A[0..32] jobid="ControlJob001">
<U1[1] cjstate=6>
>
>
>
>
\
;---------------------------------------------------------------
s6f11_504 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=504>
<L ; 1
<L ; 2
<U4[4] rptid=600>
<L ; 3
<A[16] @time="YYYYMMDDHHNNSSCC">
<A[0..32] jobid="ControlJob001">
<U1[1] cjstate=0>
>
>
>
>
\
;---------------------------------------------------------------
s6f11_600 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=600>
<L ; 1
<L ; 2
<U4[4] rptid=700>
<L ; 4
<A[16] @time="YYYYMMDDHHNNSSCC">
<A[0..32] jobid="ProcessJob001">
<A[0..32] prjstate="<PRJOBPOOLED">
<A[0..32] rcpid="<PPID001">
>
>
>
>
\
;---------------------------------------------------------------
s6f11_601 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=601>
<L ; 1
<L ; 2
<U4[4] rptid=700>
<L ; 4
<A[16] @time="YYYYMMDDHHNNSSCC">
<A[0..32] jobid="ProcessJob001">
<A[0..32] prjstate="<SETTINGUP">
<A[0..32] rcpid="<PPID001">
>
>
>
>
\
;---------------------------------------------------------------
s6f11_602 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=602>
<L ; 1
<L ; 2
<U4[4] rptid=700>
<L ; 4
<A[16] @time="YYYYMMDDHHNNSSCC">
<A[0..32] jobid="ProcessJob001">
<A[0..32] prjstate="<PROCESSING">
<A[0..32] rcpid="<PPID001">
>
>
>
>
\
;---------------------------------------------------------------
s6f11_605 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=605>
<L ; 1
<L ; 2
<U4[4] rptid=700>
<L ; 4
<A[16] @time="YYYYMMDDHHNNSSCC">
<A[0..32] jobid="ProcessJob001">
<A[0..32] prjstate="<PROCCOMPLETE">
<A[0..32] rcpid="<PPID001">
>
>
>
>
\
;---------------------------------------------------------------
s6f11_606 S6F11 W E
<L ; 3
<U4[4] dataid=0>
<U4[4] ceid=606>
<L ; 1
<L ; 2
<U4[4] rptid=700>
<L ; 4
<A[16] @time="YYYYMMDDHHNNSSCC">
<A[0..32] jobid="ProcessJob001">
<A[0..32] prjstate="<PRJOBCOMPLETE">
<A[0..32] rcpid="<PPID001">
>
>
>
>
\
;---------------------------------------------------------------
s6f11_test S6F11 W E
<L ; 3
<U4[4] dataid=2>
<U4[4] ceid=999>
<L ; 1
<L ; 2
<U4[4] rptid=3>
<L
<B[4] db=10,20,30,40>
<T[4] dt=T,F,F,T>
<S1[4] d1=10,20,-30,-40>
<U1[4] u1=50,60,70,80>
<S2[8] i2=100,200,-300,-400>
<U2[8] u2=500,600,700,800>
<S4[16] i4=1000,2000,-3000,-4000>
<U4[16] u4=5000,6000,7000,8000>
<s8[32] i8=10000,20000,-30000,-40000>
<U8[32] u8=50000,60000,70000,80000>
<F[16] f4 = 1.2,2.3,-3.4,-5.5 >
<D[32] f8 = 1.23,2.34,-3.45,-5.56 >
<A[0..20] ax= "A1234567890ABCDEF">
<J[0..20] jx= "J1234567890ABCDEF">
>
>
>
>
\
;---------------------------------------------------------------
s6f12 S6F12
<B[1] ackc6=x00>
\
;---------------------------------------------------------------
s6f13 S6F13 W E
<L ; 3
<U4[4] dataid=2>
<U4[4] ceid=999>
<L ; 1
<L ; 2
<U4[4] rptid=3>
<L ; 1
<U4[4] vid = 123>
<U2[8] portidx=5,6,7,8>
>
>
>
>
\
;---------------------------------------------------------------
s6f14 S6F14
<B[1] ackc6=x00>
\
;---------------------------------------------------------------
s6f15_ce_rep S6F15 W
<U4[4] ceid=221>
\
;---------------------------------------------------------------
s6f16 S6F16 E
<L ; 3
<U4[4] dataid=2>
<U4[4] ceid=999>
<L ; 1
<L ; 2
<U4[4] rptid=3>
<L ; 1
<U2[8] portidx=5,6,7,8>
>
>
>
>
\
;---------------------------------------------------------------
s6f19_rp S6F19 W
<U4[4] rpid=100>
\
;---------------------------------------------------------------
s6f20 S6F20 E
<L
>
\
;---------------------------------------------------------------
s6f21_an_rp S6F21 W
<U4[4] rpid=100>
\
;---------------------------------------------------------------
s6f22 S6F22 E
<L
>
\
;---------------------------------------------------------------
s6f23_spool_req S6F23 W
<U1[1] rsdc = 0>
\
;---------------------------------------------------------------
s6f24 S6F24 E
<B[1] rsda=0>
\
;---------------------------------------------------------------
s7f1_pp_inq S7F1 W
<L ; 2
<A[0..32] ppid="PPID001">
<U8[8] length=8>
>
\
;---------------------------------------------------------------
s7f2 S7F2 E
<B[1] ppgnt=x00>
\
;---------------------------------------------------------------
s7f3_pp_send S7F3 W
<L ; 2
<A[1..8] ppid="PPID001">
<A[1..20] ppbody="PPBODY-11111">
>
\
;---------------------------------------------------------------
s7f4 S7F4 E
<B[1] ackc7=x00>
\
;---------------------------------------------------------------
s7f5_pp_req S7F5 W
<L ; 1
<A[1..8] ppid="PPID001">
>
\
;---------------------------------------------------------------
s7f6 S7F6 E
<L ; 2
<A[1..8] ppid="PPID001">
<A[1..20] ppbody="PPBODY-11111">
>
\
;---------------------------------------------------------------
s7f17_pp_del1 S7F17 W
<L ; 1
<A[1..8] ppid="PPID001">
>
\
;---------------------------------------------------------------
s7f17_pp_del2 S7F17 W
<L ; 2
<A[1..8] ppid1="PPID001">
<A[1..8] ppid2="PPID002">
>
\
;---------------------------------------------------------------
s7f17_pp_del_all S7F17 W
<L ; 01
>
\
;---------------------------------------------------------------
s7f18 S7F18 E
<B[1] ackc7=x00>
\
;---------------------------------------------------------------
s7f19_cur_pp_req S7F19 W
\
;---------------------------------------------------------------
s7f20 S7F20 E
<L ; 8
<A[0..32] ppid1="PPID001">
<A[0..32] ppid2="PPID002">
<A[0..32] ppid3="PPID003">
<A[0..32] ppid4="PPID004">
<A[0..32] ppid5="PPID005">
<A[0..32] ppid6="PPID006">
<A[0..32] ppid7="PPID007">
<A[0..32] ppid8="PPID008">
>
\
;---------------------------------------------------------------
s7f23_fpp_send S7F23 W
<L ; 4
<A[0..32] ppid1="PPID0001">
<A[6] mdln="ZF1000">
<A[6] softrev="REV000">
<L
<L
<A[0..32] ccode1="01000">
<L
<A[0..32] para1="1.000">
<A[0..32] para2="2.000">
>
>
>
>
\
;---------------------------------------------------------------
s7f24 S7F24 E
<B[1] ackc7=0>
\
;---------------------------------------------------------------
s7f25_fpp_req S7F25 w
<A[0..32] ppid1="PPID001">
\
;---------------------------------------------------------------
s7f26 S7F26 e
<L ; 4
<A[0..32] ppid1="PPID001">
<A[6] mdln="ZF1000">
<A[6] softrev="REV000">
<L
<L
<A[0..32] ccode1="01000">
<L
<A[0..32] para1="1.000">
<A[0..32] para2="2.000">
>
>
>
>
\
;---------------------------------------------------------------
s7f27 S7F27_fpp_ver W
<L ; 4
<A[0..32] ppid1="PPID001">
<L
>
>
\
;---------------------------------------------------------------
s7f28 S7F28 E
\
;---------------------------------------------------------------
s7f29_fpp_inq S7F29 W E
<U4[4] datalength = 258>
\
;---------------------------------------------------------------
s7f30 S7F30
<B[1] grant7=0>
\
;---------------------------------------------------------------
s10f1_term_req S10F1 W E
<L ; 2
<B[1] tid=x00>
<A[1..80] text="Terminal Message">
>
\
;---------------------------------------------------------------
s10f2 S10F2
<B[1] ackc10=x00>
\
;---------------------------------------------------------------
s10f3_term_disp S10F3 W
<L ; 2
<B[1] tid=x00>
<A[1..80] text="Terminal Message">
>
\
;---------------------------------------------------------------
s10f4 S10F4 E
<B[1] ackc10=x00>
\
;---------------------------------------------------------------
s10f5_term_mblk S10F5 W
<L ; 2
<B[1] tid=x00>
<L
<A[1..80] text1="Terminal Message-1-">
<A[1..80] text2="Terminal Message-2-">
>
>
\
;---------------------------------------------------------------
s10f6 S10F6 E
<B[1] ackc10=x00>
\
;---------------------------------------------------------------
s14f1_attr_CJ S14F1 W
<L ; 4
<A[0] objspec>
<A[0..32] objtype = "ControlJob">
<L
>
<L
>
<L
<A[0..32] attrid="State">
>
>
\
;---------------------------------------------------------------
s14f2_CJ S14F2 E
<L ; 2
<L ; 1
<L ; 2
<A[0..32] objid1="">
<L ; 1
<L ; 2
<A[0..32] attrid1="State">
<A[0..32] attrdata1="111">
>
>
>
>
<L
<B[1] objack=0>
<L
>
>
>
\
;---------------------------------------------------------------
s14f1_attr_CAR S14F1 W
<L ; 4
<A[0] objspec>
<A[0..32] objtype = "Carrier">
<L
>
<L
>
<L
<A[0..32] attrid1="CarrierIDStatus">
<A[0..32] attrid2="CarrierAccessingStatus">
<A[0..32] attrid3="SlotMapStatus">
<A[0..32] attrid4="LocationID">
>
>
\
;---------------------------------------------------------------
s14f2_CAR S14F2 E
<L ; 2
<L ; 1
<L ; 2
<A[0..32] objid1=" ">
<L ; 4
<L ; 2
<A[0..32] attrid1="CarrierIDStatus">
<A[0..32] attrdata1=" ">
>
<L ; 2
<A[0..32] attrid2="CarrierAccessingStatus">
<A[0..32] attrdata2=" ">
>
<L ; 2
<A[0..32] attrid3="SlotMapStatus">
<A[0..32] attrdata3=" ">
>
<L ; 2
<A[0..32] attrid4="LocationID">
<A[0..32] attrdata4=" ">
>
>
>
>
<L
<B[1] objack=0>
<L
>
>
>
\
;---------------------------------------------------------------
s14f1_sttr_SUBST S14F1 W
<L ; 4
<A[0] objspec>
<A[0..32] objtype = "Substrate">
<L
>
<L
>
<L
<A[0..32] attrid1="SubstrateProcState">
<A[0..32] attrid2="SubstrateLocID">
>
>
\
;---------------------------------------------------------------
s14f2_SUBST S14F2 E
<L ; 2
<L ; 1
<L ; 2
<A[0..32] objid1=" ">
<L ; 2
<L ; 2
<A[0..32] attrid1="SubstrateProcState">
<A[0..32] attrdata1=" ">
>
<L ; 2
<A[0..32] attrid2="SubstrateLocID">
<A[0..32] attrdata2=" ">
>
>
>
>
<L
<B[1] objack=0>
<L
>
>
>
\
;---------------------------------------------------------------
s14f9_CJ S14F9 W
<L ;3
<A[0..32]="">
<A[0..32]="ControlJob">
<L ;12
<L ;2
<A[0..32]="ObjID">
<A[0..32]="CJID00011">
>
<L ;2
<A[0..32]="CarrierInputSpec">
<L
<A[0..32]="CARID_017">
>
>
<L ;2
<A[0..32]="CurrentPRJob">
<L
<A[0..32]="PRJID0001">
>
>
<L ;2
<A[0..32]="DataCollectionPlan">
<A[0..32]="DATA01">
>
<L ;2
<A[0..32]="MtrlOutByStatus">
<L ;0
>
>
<L ;2
<A[0..32]="MtrlOutSpec">
<L ;0
>
>
<L ;2
<A[0..32]="PauseEvent">
<L ;0
>
>
<L ;2
<A[0..32]="ProcessingCtrlSpec">
<L ;1
<L ;3
<A[0..32]="PRJID0001">
<L ;1
<L ;2
<A[0..32]="RULE1"> ; rule name
<A[0..32]="">
>
>
<L ; output rule
<L
<U1[1]=00> ; material status
<A[0..32] = "" >
>
>
>
>
>
<L ;2
<A[0..32]="ProcessOrderMgmt">
<U1[1]=1>
>
<L ;2
<A[0..32]="PRJobStatusList">
<L
>
>
<L ;2
<A[0..32]="StartMethod">
<T[1]=F>
>
<L ;2
<A[0..32]="State">
<U1[1]=0>
>
>
>
\
;---------------------------------------------------------------
s14f10 S14F10 E
<L ;3
<A[0..32]="">
<L ; 12 (?)
<L ;2
<A[0..32]="ObjID">
<A[0..32]="CJ00123-01">
>
<L ;2
<A[0..32]="CarrierInputSpec">
<L
<A[0..32]="PK0287">
>
>
<L ;2
<A[0..32]="CurrentPRJob">
<A[0..32]="PRJ0001">
>
<L ;2
<A[0..32]="DataCollectionPlan">
<A[0..32]="DATA01">
>
<L ;2
<A[0..32]="MtrlOutByStatus">
<L ;0
>
>
<L ;2
<A[0..32]="MtrlOutSpec">
<L ;0
>
>
<L ;2
<A[0..32]="PauseEvent">
<L ;0
>
>
<L ;2
<A[0..32]="ProcessingCtrlSpec">
<L ;1
<L ;3
<A[0..32]="PRJ0001">
<L ;1
<L ;2
<A[0..32]="RULE1"> ; rule name
<A[0..32]="">
>
>
<L ; output rule
>
<B[1]=x00> ; material status
>
>
>
<L ;2
<A[0..32]="ProcessOrderMgmt">
<U1[1]=1>
>
<L ;2
<A[0..32]="PRJobStatusList">
<L
>
>
<L ;2
<A[0..32]="StartMethod">
<T[1]=F>
>
<L ;2
<A[0..32]="State">
<U1[1]=0>
>
>
<L
<U1[1] = 0> ; objack
<L
>
>
>
\
;---------------------------------------------------------------
s14f11_del_cj S14F11 W
<L ; 4
<A[0..32] objspec="Equipment">
<L
<L
<A[0..32] objid="OBJID">
<A[0..32] attrdat="CJID0001">
>
>
>
\
;---------------------------------------------------------------
s14f12 S14F12 E
<L ; L2
<L ; L0
>
<L ; L2
<U2[2] objack=0> ;
<L
>
>
>
\
;---------------------------------------------------------------
s14f19_ret_job S14F19 W
<L ; 5
<U4[4] dataid = 5>
<U4[4] opid = 2113 >
<A[0..80] objspec = "RETICLE">
<A[0..80] svcname = "MoveReticle">
<L
<L
<A[0..80] spname = "ReticleID">
<A[0..80] spval1 ="RET0001">
>
<L
<A[0..80] portid = "PortID">
<U1[1] spva21 = 101>
>
>
>
\
;---------------------------------------------------------------
s14f20 S14F20 E
<L ; L4
<B[1] svcack = 0>
<U4[4] linkid = 1344>
<L
<L
<A[0..80] spname = "ReticleID">
<A[0..80] spval1 ="RET0001">
>
<L
<A[0..80] portid = "PortID">
<U1[1] spva21 = 101>
>
>
<L
<B[1] svcack_ex = 0>
<L
<L
<U1[1] errcode1 = 1>
<A[0..80] errtext1 = "err-001">
>
<L
<U1[1] errcode2 = 2>
<A[0..80] errtext2 = "err-002">
>
>
>
>
\
;-------------------------------------------------------------------------------
S14F19_2 S14F19 W
<L // L-5
<U4[4] dataid = 5>
<U4[4] opid = 2113>
<A[0..80] objspec = "RETICLE">
<A[0..80] svcname = "MoveReticle">
<L // L-2
<L // L-2
<A[0..80] spname_1 = "ReticleID">
<A[0..80] spval1 ="RET0002">
>
<L // L-2
<A[0..80] spname_2 = "PortID">
<U1[1] spva21 = 101>
>
>
>
\
;-------------------------------------------------------------------------------
S14F20_2 S14F20 E
<L // L-4
<B[1] svcack = x00>
<U4[4] linkid = 123>
<L // L-2
<L // L-2
<A[0..80] spname_1 = "ReticleID">
<A[0..80] spval1 ="RET0002">
>
<L // L-2
<A[0..80] spname_2 = "PortID">
<U1[1] spva21 = 101>
>
>
<L // L-2
<B[1] svcack_e = x00>
<L
>
>
>
\
;-------------------------------------------------------------------------------
S14F21 S14F21 W E
<L // L-5
<U4[4] dataid = 0>
<U4[4] opid = 2113>
<U4[4] linkid = 1>
<L // L-2
<L // L-2
<A[0..80] spname_1 = "ReticleID">
<U4[4] spval_1 = 100>
>
<L // L-2
<A[0..80] spname_2 = "PortID">
<A[0..80] spval_2 = "200">
>
>
<L // L-2
<B[1] svcack = x00>
>
<L // L-0
>
>
\
;-------------------------------------------------------------------------------
S14F22 S14F22
<U1[1] = dataack = 0>
\
;--------------------------------------------------------------
s15f1_rcp_inq S15F1 W
<L ; 4
<U4[4] dataid=0>
<A[0..80] rcpspec="RCP0012">
<U4[4] rcmdatasize = 1024>
>
\
;---------------------------------------------------------------
s15f2 S15F2 E
<B[1] rmgrnt=0>
\
;--------------------------------------------------------------
s15f3_rcp_name S15F3 W
<L ; 4
<A[0..80] rcpspec="RCP0012">
<U1[1] rmnscmd = 5> ; 1=create 5-delete
>
\
;---------------------------------------------------------------
s15f4 S15F4 E
<L
<U1[1] rmack=0>
<L
<L
<U1[1] errcode1 = 1>
<A[0..80] errtext1 = "err-001">
>
<L
<U1[1] errcode2 = 2>
<A[0..80] errtext2 = "err-002">
>
>
>
\
;--------------------------------------------------------------
s15f5_rcp_rename S15F5 W
<L ; 2
<A[0..80] rcpspec="RCP0012">
<A[0..80] rmnewns="RCP0023">
>
\
;---------------------------------------------------------------
s15f6 S15F6 E
<L
<U1[1] rmack=0>
<L
<L
<U1[1] errcode1 = 1>
<A[0..80] errtext1 = "err-001">
>
<L
<U1[1] errcode2 = 2>
<A[0..80] errtext2 = "err-002">
>
>
>
\
;--------------------------------------------------------------
s15f7_rcp_space S15F7 W
<A[0..80] rcpspec="RCP0023">
\
;---------------------------------------------------------------
s15f8 S15F8 E
<L ; 2
<U4[4] rmspace = 512>
<L
<U1[1] rmack=0>
<L
<L
<U1[1] errcode1 = 1>
<A[0..80] errtext1 = "err-001">
>
<L
<U1[1] errcode2 = 2>
<A[0..80] errtext2 = "err-002">
>
>
>
>
\
;--------------------------------------------------------------
s15f9_rcp_stat S15F9 W
<A[0..80] rcpspec="RCP0023">
\
;---------------------------------------------------------------
s15f10 S15F10 E
<L ; 2
<U1[1] rcpstat = 0>
<A[0..80] rcpvers = "VER-10">
<L
<U1[1] rmack=0>
<L
<L
<U1[1] errcode1 = 1>
<A[0..80] errtext1 = "err-001">
>
<L
<U1[1] errcode2 = 2>
<A[0..80] errtext2 = "err-002">
>
>
>
>
\
;--------------------------------------------------------------
s15f13_rcp_create S15F13 W
<L ; 2
<U4[4] dataid=0>
<T[1] rcpupdt=T>
<A[0..80] rcpspec="RCP0012">
<L
<L
<A[0..80] rcpattrid1="ATTR1">
<U4[4] rcpattrdata1 =987>
>
>
<A[0..80] rcpbody="rcpbody">
>
\
;---------------------------------------------------------------
s15f14 S15F14 E
<L
<U1[1] rmack=0>
<L
<L
<U1[1] errcode1 = 1>
<A[0..80] errtext1 = "err-001">
>
<L
<U1[1] errcode2 = 2>
<A[0..80] errtext2 = "err-002">
>
>
>
\
;---------------------------------------------------------------
s15f14_H S15F14
<L
<U1[1] rmack=0>
<L
<L
<U1[1] errcode1 = 1>
<A[0..80] errtext1 = "err-001">
>
<L
<U1[1] errcode2 = 2>
<A[0..80] errtext2 = "err-002">
>
>
>
\
;--------------------------------------------------------------
s15f17_rcp_retrieve S15F17 W
<L ; 2
<A[0..80] rcpspec="RCP0012">
<B[1] rcpseccode= 1>
>
\
;---------------------------------------------------------------
s15f18 S15F18 E
<L // 2
<L // q
<L // r
<A[0..80] rcpsecnm="1223">
<L
<L
<A[0..80] rcpattrid = "rcpattrid">
<A[0..80] rcpattrdata = "attrdata">
>
>
>
<A[0..80] rcpbody = "rcpbody">
<L // m
<L // 2
<A[0..88] rcpsecnm1 = 12230>
<L // a
<L // 2
<A[0..80] rcpattrid11 = "attrid_11">
<A[0..80] rcpattrdata11= "attrdata_11">
>
>
>
>
>
<L
<U1[1] rmack=0>
<L
<L
<U1[1] errcode = 12>
<A[0..80] errtext = "error">
>
>
>
>
\
;---------------------------------------------------------------
s16f5_prj_cmd S16F5 W
<L ; 4
<U4[4] dataid=0>
<A[0..32] prjobid="PRJob001">
<A[0..32] prjcmdname = "PAUSE">
<L
<L
<A[0..32] cpname1 = "CPNAME1">
<B[1] cpval1 = 13>
>
>
>
\
;---------------------------------------------------------------
s16f6 S16F6 E
<L
<A[0..32] ="PRJob001">
<L
<T[1]=1>
<L
<L
<u1[1] errcode=1>
<A[0..32] errtext1 = "errtext1">
>
>
>
>
\
;---------------------------------------------------------------
s16f11_prj_create S16F11 W
<L ; 7
<U4[4] dataid=0>
<A[0..32] oprjobid="PRJID001">
<B[1] mf = 13>
<L ; L,n
<L ; L,1
<A[0..32] carid1="CARID_01">
<L ; L,j
<U1[1]=101>
<U1[1]=102>
<U1[1]=103>
<U1[1]=104>
<U1[1]=105>
<U1[1]=106>
<U1[1]=107>
<U1[1]=108>
<U1[1]=109>
<U1[1]=110>
<U1[1]=111>
<U1[1]=112>
<U1[1]=113>
<U1[1]=114>
<U1[1]=115>
<U1[1]=116>
<U1[1]=117>
<U1[1]=118>
<U1[1]=119>
<U1[1]=120>
<U1[1]=121>
<U1[1]=122>
<U1[1]=123>
<U1[1]=124>
<U1[1]=125>
>
>
; <L
; <A[0..32] carid2="C002">
; <L
; <U1[1]=201>
; <U1[1]=202>
; <U1[1]=203>
; <U1[1]=204>
; <U1[1]=205>
; <U1[1]=206>
; <U1[1]=207>
; <U1[1]=208>
; <U1[1]=209>
; <U1[1]=210>
; <U1[1]=211>
; <U1[1]=212>
; <U1[1]=213>
; <U1[1]=214>
; <U1[1]=215>
; <U1[1]=216>
; <U1[1]=217>
; <U1[1]=218>
; <U1[1]=219>
; <U1[1]=220>
; <U1[1]=221>
; <U1[1]=222>
; <U1[1]=223>
; <U1[1]=224>
; <U1[1]=225>
; >
; >
>
<L
<U1[1] prrcpmethod>
<A[0..32] rcpspec="PPID0001">
<L
<L
<A[0..32] rcpparn1="para1">
<A[0..32] rcpparval1="val1">
>
<L
<A[0..32] rcpparn="para2">
<A[0..32] rcpparval2="val2">
>
>
>
<T[1] PRPRICESSSTART=0>
<L
<U4[4] PRPAUSEEVENT=100>
>
>
\
;---------------------------------------------------------------
s16f12 S16F12 E
<L
<A[0..32] ="PRJob001">
<L
<T[1]=1>
<L
>
>
>
\
;---------------------------------------------------------------
s16f15_prj_m_create S16F15 W
<L ; 4
<U4[4] dataid=0>
<L ; L,p
<L ; L,6
<A[0..32] oprjobid="PRJID001">
<B[1] mf = 13>
<L ; L,n
<L ; L,1
<A[0..32] carid1="CARID_01">
<L ; L,j
<U1[1]=101>
<U1[1]=102>
<U1[1]=103>
<U1[1]=104>
<U1[1]=105>
<U1[1]=106>
<U1[1]=107>
<U1[1]=108>
<U1[1]=109>
<U1[1]=110>
<U1[1]=111>
<U1[1]=112>
<U1[1]=113>
<U1[1]=114>
<U1[1]=115>
<U1[1]=116>
<U1[1]=117>
<U1[1]=118>
<U1[1]=119>
<U1[1]=120>
<U1[1]=121>
<U1[1]=122>
<U1[1]=123>
<U1[1]=124>
<U1[1]=125>
>
>
; <L
; <A[0..32] carid2="C002">
; <L
; <U1[1]=201>
; <U1[1]=202>
; <U1[1]=203>
; <U1[1]=204>
; <U1[1]=205>
; <U1[1]=206>
; <U1[1]=207>
; <U1[1]=208>
; <U1[1]=209>
; <U1[1]=210>
; <U1[1]=211>
; <U1[1]=212>
; <U1[1]=213>
; <U1[1]=214>
; <U1[1]=215>
; <U1[1]=216>
; <U1[1]=217>
; <U1[1]=218>
; <U1[1]=219>
; <U1[1]=220>
; <U1[1]=221>
; <U1[1]=222>
; <U1[1]=223>
; <U1[1]=224>
; <U1[1]=225>
; >
; >
>
<L
<U1[1] prrcpmethod>
<A[0..32] rcpspec="PPID0001">
<L
<L
<A[0..32] rcpparn1="para1">
<A[0..32] rcpparval1="val1">
>
<L
<A[0..32] rcpparn="para2">
<A[0..32] rcpparval2="val2">
>
>
>
<T[1] PRPRICESSSTART=0>
<L
<U4[4] PRPAUSEEVENT=100>
>
>
>
>
\
;---------------------------------------------------------------
s16f16 S16F16 E
<L
<L
<A[0..32] ="PRJob001">
>
<L
<T[1]=1>
<L
>
>
>
\
;---------------------------------------------------------------
s16f17_prj_deque S16F17 W
<L ; n
<A[0..32] prjobid1="PRJob001">
<A[0..32] prjobid2="PRJob002">
>
\
s16f17_prj_deq_all S16F17 W
<L ; n
>
\
;---------------------------------------------------------------
s16f18 S16F18 E
<L
<L
>
<L
<T[1] acka = T >
<L
<L
<U1[1] errcode=1>
<A[0..32] errtext1 = "errtext1">
>
>
>
>
\
;---------------------------------------------------------------
s16f19_prj_all_job S16F19 W
\
;---------------------------------------------------------------
s16f20 S16F20 E
<L
<L
<A[0..32] prjob1="PRJob001">
<U1[1] state1 = 0 >
>
<L
<A[0..32] prjob2="PRJob002">
<U1[1] state2 = 1 >
>
<L
<A[0..32] prjob3="PRJob003">
<U1[1] state3 = 2 >
>
>
\
;---------------------------------------------------------------
s16f21_prj_space S16F21 W
\
;---------------------------------------------------------------
s16f22 S16F22 E
<U2[2]=0>
\
;---------------------------------------------------------------
s16f27_cj_cmd_req S16F27 W
<L ; 3
<A[0..32] ctlobid="CJ00123-01">
<U1[1] ctljobcmd = 1>
<L
<A[0..32] cpname1 = "CPNAME1">
<B[1] cpval1 = 13>
>
>
\
;---------------------------------------------------------------
s16f28 S16F28 E
<L
<T[1] acka= 0>
<L
<U8[8] errcode=1>
<A[0..32] errtext1 = "errtext1">
>
>
\